Dr. Jong-Shing Bow
Invited Talk Topic: Advanced Circuit-Edit via Focused Ion Beam and its Challenge
The IC function re-check and confirmation are usually relied on the circuit-edit via FIB first, and it really reduces time-to-market during IC development. A circuit-edit via FIB on 7 nm chip is demonstrated, even in back-side process. We also make failure analysis to observe the failure mode once circuit-edit fail. The challenge of current circuit-edit via FIB on the advanced IC is discussed.